Events

2025

43. Improvement of Structural Uniformity in Pad Surfaces for Control of Dishing Defect in Chemical Mechanical Polishing
Seulah Park, Sukkyung Kang, Dong Geun Kim, Sanha Kim
May 15, 2025 1:00 PM — 2:00 PM Jeju, South Korea
42. Chemical Mechanical Polishing for Enhancement of Hybrid Bonding Strength
Sanha Kim, Seulah Park, Sukkyung Kang, Dong Geun Kim
May 15, 2025 11:00 AM — 12:00 PM Jeju, South Korea
41. High-precision Terahertz Interferometry for Monitoring Semiconductor Wafer Thinning Process
Young Jin Kim, Guseon Kang, Jaeyoon Kim, Jun Hyung Park, Sukkyung Kang, Dong Geun Kim, Sanha Kim
May 15, 2025 9:00 AM — 10:00 AM Jeju, South Korea
40. Effect of Plowing Friction in Bolt Fastening on Coated Steel Plates
Sukkyung Kang, Seounghee Yun, Hyena Hwang, Sanha Kim
Apr 24, 2025 9:00 AM — 6:00 PM Himeji, Japan
39. Ru Passivation Layer Enables Cu-Cu Direct Bonding at Low Temperatures with Oxidation Inhibition
Chan Su Jeon, Sukkyung Kang, Sanha Kim, Kyung Min Kim
Apr 11, 2025 9:00 AM — 6:00 PM Seattle, WA, USA
38. Cu/Polymer Hybrid Bonding with Plasma-Assisted Chemical Mechanical Polishing
Sukkyung Kang, Chan Su Jeon, Juseong Park, Seulah Park, Kyung Min Kim, Sanha Kim
Apr 3, 2025 1:00 PM — 6:00 PM Incheon, South Korea
37. Modeling and Reduction of Cu Dishing according to Pad Surface Properties in Chemical Mechanical Polishing
Seulah Park, Sukkyung Kang, Dong Geun Kim, Sanha Kim
Apr 3, 2025 9:00 AM — 12:00 PM Incheon, South Korea
36. Nano Sandpaper using Carbon Nanotubes as Coated Abrasives for Ultraprecision Surface Finishing
Sukkyung Kang, Ji-hun Jeong, Hyun Jun Ryu, Sanha Kim
Feb 12, 2025 9:00 AM — Feb 14, 2025 6:00 PM Busan, South Korea

2024

35. Cu/Polymer CMP Technology for Heterogeneous Semiconductor Integration
Sukkyung Kang, Chan Su Jeon, Seulah Park, Juseong Park, Kyung Min Kim, Sanha Kim
Nov 21, 2024 9:00 AM — 6:00 PM Suwon, South Korea
34. Optimization of Additives to Fabricate Fine-Grained Cu via Electroplating for Cu-Cu Direct Bonding
Jun-Hee Son, Jisoo Han, Hyun-Dong Lee, Sukkyung Kang, Sanha Kim, Hoo-Jeong Lee
Nov 10, 2024 9:00 AM — 6:00 PM Busan, South Korea
33. Nano Sandpaper for Precise Surface Refinement Using Vertically Aligned Carbon Nanotubes
Sukkyung Kang, Hyun Jun Ryu, Ji-hun Jeong, Taehoon Kim, Sanha Kim
Nov 9, 2024 9:00 AM — 6:00 PM Jeju, South Korea
32. Soft Microstructured Surfaces with Ultrathin Hard Skin Fabricated by Stereolithography
Dong Geun Kim, Sukkyung Kang, Seulah Park, Sanha Kim
Nov 8, 2024 9:00 AM — 6:00 PM Jeju, South Korea
31. Precision Dishing Control in Chemical Mechanical Polishing using Surface Structured Pads for Hybrid Bonding
Seulah Park, Sukkyung Kang, Dong Geun Kim, Sanha Kim
Nov 7, 2024 9:00 AM — 6:00 PM Jeju, South Korea
30. Ultrathin Nanoporous Cu with Lithiophilicity-Lithiophobicity Gradient by MWCNT for Anode-Free Li-Metal Battery Anode Current Collector
Inyeong Yang, Dongyeon Won, Sukkyung Kang, Sanha Kim
Nov 6, 2024 9:00 AM — 6:00 PM Jeju, South Korea
29. Chemical Mechanical Polishing of Polymer Surfaces for Cu/Polymer Hybrid Bonding Process
Sukkyung Kang, Chan Su Jeon, Seulah Park, Juseong Park, Kyung Min Kim, Sanha Kim
Oct 31, 2024 9:00 AM — 6:00 PM Daejeon, South Korea
28. Development of Methodology for Predicting Friction Coefficient in Bolt and Coated/Uncoated Steel Plate Fastening
Hyena Hwang, Sukkyung Kang, Seounghee Yun, Sanha Kim
Jun 19, 2024 9:00 AM — Jun 22, 2024 6:00 PM Geoje, South Korea
27. CMP Technology for Cu/Polymer in 3D Stacked Semiconductor Fabrication
Sukkyung Kang, Chan Su Jeon, Kyung Min Kim, Sanha Kim
May 8, 2024 9:00 AM — May 10, 2024 6:00 PM Jeju, South Korea
26. Low-temperature polycrystalline Ge growth on PtSe2 for BEOL compatible devices
Hwayong Choi, Sukkyung Kang, Minseung Gyeon, Yeji Kim, Minhyeok Jeong, Kibum Kang, Sanha Kim, Junseok Heo
Jan 28, 2024 9:00 AM — Jan 31, 2024 6:00 PM Taipei, Taiwan
25. CMP Technology for Cu/Polymer Hybrid Bonding
Sukkyung Kang, Juseong Park, Chan Su Jeon, Kyung Min Kim, Sanha Kim
Jan 24, 2024 9:00 AM — Jan 26, 2024 6:00 PM Gyeongju, South Korea

2023

24. Plasma etched vertically aligned carbon nanotube embedded polyurethane surface for precision semiconductor wafer polishing
Sukkyung Kang, Ji-hun Jeong, Hyun Jun Ryu, Dongyeon Won, Sanha Kim [Received MRS 2023 Outstanding Student Poster Award]
Nov 26, 2023 10:00 AM — Dec 1, 2023 6:00 PM Boston, MA, USA
23. Ultrathin Nanofibrillar Cu Sheet Covered with Directly Grown Lithiophobic CNT for Anode-free Li-metal Battery Anode Current Collectors
Inyeong Yang, Dongyeon Won, Sukkyung Kang, Sanha Kim
Nov 26, 2023 9:00 AM — Dec 1, 2023 5:00 PM Boston, MA, USA
22. Demonstration of Ruthenium Passivation for Cu-to-Cu Direct Bonding
Myeongeun Kim, Sukkyung Kang, Sanha Kim, Kyung Min Kim
Oct 31, 2023 10:00 AM — Nov 3, 2023 6:00 PM Jeju, South Korea
21. Plasma-Assisted CMP for Planarization of Adhesive Polymers in 3D Stacked Semiconductor Devices
Sukkyung Kang, Juseong Park, Chan Su Jeon, Kyung Min Kim, Sanha Kim
Oct 31, 2023 9:00 AM — Nov 2, 2023 6:00 PM Kanazawa, Japan
20. Advanced Polishing Technology Using Vertically Aligned Carbon Nanotube Thin Films
Sukkyung Kang, Ji-hun Jeong, Sanha Kim
Jul 10, 2023 9:00 AM — Jul 12, 2023 6:00 PM Seoul, South Korea
19. Effect of coating hardness and thickness on friction in bolt fastening
Sukkyung Kang, Seounghee Yun, Hyena Hwang, Sanha Kim
Apr 2, 2023 9:00 AM — Apr 5, 2023 6:00 PM Busan, South Korea
18. Fracture and Wear Behavior of Hard-on-Soft Bi-layered Polyurethane Surfaces
Hyun Jun Ryu, Ji-hun Jeong, Sukkyung Kang, Youn Sik Eom, Sanha Kim
Apr 2, 2023 9:00 AM — Apr 5, 2023 6:00 PM Busan, South Korea
17. Self-pressure regulating CMP process for hybrid Cu/polymer bonding
Sukkyung Kang, Juseong Park, Kyung Min Kim, Sanha Kim
Apr 2, 2023 9:00 AM — Apr 5, 2023 6:00 PM Busan, South Korea
16. Characterization of Friction between Bolts and Coated Steel Plates
Seounghee Yun, Sukkyung Kang, Hyena Hwang, Sanha Kim
Apr 2, 2023 9:00 AM — Apr 5, 2023 6:00 PM Busan, South Korea

2021

10. Abrasive Wear and Surface Polishing by Vertically Aligned Carbon Nanotubes
Sukkyung Kang, Seong Jae Kim, Ji-hun Jeong, Sanha Kim [Received KSPE Best Paper Award]
Nov 24, 2021 11:00 AM — Nov 26, 2021 6:00 PM Busan, South Korea
9. Effect of bolt surface properties on characteristics of tightening friction
Sukkyung Kang, Somin Shin, Hyena Hwang, Sanha Kim
Nov 24, 2021 10:00 AM — Nov 26, 2021 5:00 PM Busan, South Korea
8. Manipulating Mechanical Properties of Pad Surface Asperities for Material Removal Rate Enhancement in Chemical Mechanical Polishing
Hyun Jun Ryu, Dong Geun Kim, Sukkyung Kang, Ji-hun Jeong, Sanha Kim
Nov 24, 2021 9:00 AM — Nov 26, 2021 4:00 PM Busan, South Korea
7. Prediction of underhead friction coefficient in bolt tightening
Sukkyung Kang, Somin Shin, Hyena Hwang, Sanha Kim
Oct 20, 2021 9:00 AM — Oct 22, 2021 6:00 PM Jeju, South Korea
6. Mechanical abrasion by bi-layered pad micro-asperity in chemical mechanical polishing
Hyun Jun Ryu, Dong Geun Kim, Sukkyung Kang, Ji-hun Jeong, Sanha Kim / Jung-Hoon Chun
Aug 22, 2021 9:00 AM — Aug 29, 2021 6:00 PM Paris, France
5. Abrasive polishing using composite pads with fixed vertically aligned carbon nanotubes
Sukkyung Kang, Seong Jae Kim, Ji-hun Jeong, Sanha Kim
Jul 21, 2021 9:00 AM — Jul 23, 2021 6:00 PM Jeju, South Korea
4. Fabrication of fixed-abrasive pads using vertical aligned CNTs and analysis of its mechanical polishing performances
Sukkyung Kang, Seong Jae Kim, Ji-hun Jeong, Sanha Kim
May 12, 2021 9:00 AM — May 14, 2021 6:00 PM Jeju, South Korea
3. Characteristics of tightening friction by surface topography of bolt underhead
Sukkyung Kang, Somin Shin, Hyena Hwang, Sanha Kim [Received KTS Outstanding Paper Award]
Apr 21, 2021 9:00 AM — Apr 23, 2021 6:00 PM South Korea