Events

2024

35. Cu/Polymer CMP Technology for Heterogeneous Semiconductor Integration
Sukkyung Kang, Chan Su Jeon, Seulah Park, Juseong Park, Kyung Min Kim, Sanha Kim
Nov 21, 2024 9:00 AM — 6:00 PM Suwon, South Korea
34. Optimization of Additives to Fabricate Fine-Grained Cu via Electroplating for Cu-Cu Direct Bonding
Jun-Hee Son, Jisoo Han, Hyun-Dong Lee, Sukkyung Kang, Sanha Kim, Hoo-Jeong Lee
Nov 10, 2024 9:00 AM — 6:00 PM Busan, South Korea
33. Nano Sandpaper for Precise Surface Refinement Using Vertically Aligned Carbon Nanotubes
Sukkyung Kang, Hyun Jun Ryu, Ji-hun Jeong, Taehoon Kim, Sanha Kim
Nov 9, 2024 9:00 AM — 6:00 PM Jeju, South Korea
32. Soft Microstructured Surfaces with Ultrathin Hard Skin Fabricated by Stereolithography
Dong Geun Kim, Sukkyung Kang, Seulah Park, Sanha Kim
Nov 8, 2024 9:00 AM — 6:00 PM Jeju, South Korea
31. Precision Dishing Control in Chemical Mechanical Polishing using Surface Structured Pads for Hybrid Bonding
Seulah Park, Sukkyung Kang, Dong Geun Kim, Sanha Kim
Nov 7, 2024 9:00 AM — 6:00 PM Jeju, South Korea
30. Ultrathin Nanoporous Cu with Lithiophilicity-Lithiophobicity Gradient by MWCNT for Anode-Free Li-Metal Battery Anode Current Collector
Inyeong Yang, Dongyeon Won, Sukkyung Kang, Sanha Kim
Nov 6, 2024 9:00 AM — 6:00 PM Jeju, South Korea
29. Chemical Mechanical Polishing of Polymer Surfaces for Cu/Polymer Hybrid Bonding Process
Sukkyung Kang, Chan Su Jeon, Seulah Park, Juseong Park, Kyung Min Kim, Sanha Kim
Oct 31, 2024 9:00 AM — 6:00 PM Daejeon, South Korea
28. Development of Methodology for Predicting Friction Coefficient in Bolt and Coated/Uncoated Steel Plate Fastening
Hyena Hwang, Sukkyung Kang, Seounghee Yun, Sanha Kim
Jun 19, 2024 9:00 AM — Jun 22, 2024 6:00 PM Geoje, South Korea
27. CMP Technology for Cu/Polymer in 3D Stacked Semiconductor Fabrication
Sukkyung Kang, Chan Su Jeon, Kyung Min Kim, Sanha Kim
May 8, 2024 9:00 AM — May 10, 2024 6:00 PM Jeju, South Korea
26. Low-temperature polycrystalline Ge growth on PtSe2 for BEOL compatible devices
Hwayong Choi, Sukkyung Kang, Minseung Gyeon, Yeji Kim, Minhyeok Jeong, Kibum Kang, Sanha Kim, Junseok Heo
Jan 28, 2024 9:00 AM — Jan 31, 2024 6:00 PM Taipei, Taiwan
25. CMP Technology for Cu/Polymer Hybrid Bonding
Sukkyung Kang, Juseong Park, Chan Su Jeon, Kyung Min Kim, Sanha Kim
Jan 24, 2024 9:00 AM — Jan 26, 2024 6:00 PM Gyeongju, South Korea

2023

24. Plasma etched vertically aligned carbon nanotube embedded polyurethane surface for precision semiconductor wafer polishing
Sukkyung Kang, Ji-hun Jeong, Hyun Jun Ryu, Dongyeon Won, Sanha Kim [Received MRS 2023 Outstanding Student Poster Award]
Nov 26, 2023 10:00 AM — Dec 1, 2023 6:00 PM Boston, MA, USA
23. Ultrathin Nanofibrillar Cu Sheet Covered with Directly Grown Lithiophobic CNT for Anode-free Li-metal Battery Anode Current Collectors
Inyeong Yang, Dongyeon Won, Sukkyung Kang, Sanha Kim
Nov 26, 2023 9:00 AM — Dec 1, 2023 5:00 PM Boston, MA, USA
22. Demonstration of Ruthenium Passivation for Cu-to-Cu Direct Bonding
Myeongeun Kim, Sukkyung Kang, Sanha Kim, Kyung Min Kim
Oct 31, 2023 10:00 AM — Nov 3, 2023 6:00 PM Jeju, South Korea
21. Plasma-Assisted CMP for Planarization of Adhesive Polymers in 3D Stacked Semiconductor Devices
Sukkyung Kang, Juseong Park, Chan Su Jeon, Kyung Min Kim, Sanha Kim
Oct 31, 2023 9:00 AM — Nov 2, 2023 6:00 PM Kanazawa, Japan
20. Advanced Polishing Technology Using Vertically Aligned Carbon Nanotube Thin Films
Sukkyung Kang, Ji-hun Jeong, Sanha Kim
Jul 10, 2023 9:00 AM — Jul 12, 2023 6:00 PM Seoul, South Korea
19. Effect of coating hardness and thickness on friction in bolt fastening
Sukkyung Kang, Seounghee Yun, Hyena Hwang, Sanha Kim
Apr 2, 2023 9:00 AM — Apr 5, 2023 6:00 PM Busan, South Korea
18. Fracture and Wear Behavior of Hard-on-Soft Bi-layered Polyurethane Surfaces
Hyun Jun Ryu, Ji-hun Jeong, Sukkyung Kang, Youn Sik Eom, Sanha Kim
Apr 2, 2023 9:00 AM — Apr 5, 2023 6:00 PM Busan, South Korea
17. Self-pressure regulating CMP process for hybrid Cu/polymer bonding
Sukkyung Kang, Juseong Park, Kyung Min Kim, Sanha Kim
Apr 2, 2023 9:00 AM — Apr 5, 2023 6:00 PM Busan, South Korea
16. Characterization of Friction between Bolts and Coated Steel Plates
Seounghee Yun, Sukkyung Kang, Hyena Hwang, Sanha Kim
Apr 2, 2023 9:00 AM — Apr 5, 2023 6:00 PM Busan, South Korea

2021

10. Abrasive Wear and Surface Polishing by Vertically Aligned Carbon Nanotubes
Sukkyung Kang, Seong Jae Kim, Ji-hun Jeong, Sanha Kim [Received KSPE Best Paper Award]
Nov 24, 2021 11:00 AM — Nov 26, 2021 6:00 PM Busan, South Korea
9. Effect of bolt surface properties on characteristics of tightening friction
Sukkyung Kang, Somin Shin, Hyena Hwang, Sanha Kim
Nov 24, 2021 10:00 AM — Nov 26, 2021 5:00 PM Busan, South Korea
8. Manipulating Mechanical Properties of Pad Surface Asperities for Material Removal Rate Enhancement in Chemical Mechanical Polishing
Hyun Jun Ryu, Dong Geun Kim, Sukkyung Kang, Ji-hun Jeong, Sanha Kim
Nov 24, 2021 9:00 AM — Nov 26, 2021 4:00 PM Busan, South Korea
7. Prediction of underhead friction coefficient in bolt tightening
Sukkyung Kang, Somin Shin, Hyena Hwang, Sanha Kim
Oct 20, 2021 9:00 AM — Oct 22, 2021 6:00 PM Jeju, South Korea
6. Mechanical abrasion by bi-layered pad micro-asperity in chemical mechanical polishing
Hyun Jun Ryu, Dong Geun Kim, Sukkyung Kang, Ji-hun Jeong, Sanha Kim / Jung-Hoon Chun
Aug 22, 2021 9:00 AM — Aug 29, 2021 6:00 PM Paris, France
5. Abrasive polishing using composite pads with fixed vertically aligned carbon nanotubes
Sukkyung Kang, Seong Jae Kim, Ji-hun Jeong, Sanha Kim
Jul 21, 2021 9:00 AM — Jul 23, 2021 6:00 PM Jeju, South Korea
4. Fabrication of fixed-abrasive pads using vertical aligned CNTs and analysis of its mechanical polishing performances
Sukkyung Kang, Seong Jae Kim, Ji-hun Jeong, Sanha Kim
May 12, 2021 9:00 AM — May 14, 2021 6:00 PM Jeju, South Korea
3. Characteristics of tightening friction by surface topography of bolt underhead
Sukkyung Kang, Somin Shin, Hyena Hwang, Sanha Kim [Received KTS Outstanding Paper Award]
Apr 21, 2021 9:00 AM — Apr 23, 2021 6:00 PM South Korea